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NANOLITHOGRAPHY EQUIPMENT FOR IT, ELECTRONICS AND PHOTONICS – A TECHNOLOGY, INDUSTRY AND GLOBAL MARKET ANALYSIS
(View Introduction/Table Of Contents)
Publish Date: Nov 2009,   Pages: 444,   Report Code: ET-110
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1. INTRODUCTIONi-vii
Free

INTRODUCTION..................................................................................................................................I

STUDY GOAL AND OBJECTIVES ............................................................................................. II

REASONS FOR DOING THE STUDY .......................................................................................III

CONTRIBUTIONS OF THE STUDY..........................................................................................III

SCOPE AND FORMAT................................................................................................................ IV

METHODOLOGY..........................................................................................................................V

INFORMATION SOURCES ..........................................................................................................V

WHOM THE STUDY CATERS TO.............................................................................................VI

AUTHOR’S CREDENTIALS .......................................................................................................VI

 Add 
2. EXECUTIVE SUMMARYVIII-X
$200.00
$140.00

EXECUTIVE SUMMARY..........................................................................................................VIII

SUMMARY TABLE VALUE OF NONFABRICATION EQUIPMENT FOR

SEMICONDUCTORS, THROUGH 2014..................................................................................... IX

SUMMARY FIGURE VALUE OF NANOFABRICATION EQUIPMENT FOR

SEMICONDUCTORS, 2009-2014 ................................................................................................ IX

 Add 
3. INDUSTRY OVERVIEW1-25
$1,250.00
$875.00

INDUSTRY OVERVIEW .............................................................................................................. 1

TABLE 1 VALUE OF SEMICONDUCTOR NANOFABRICATION EQUIPMENT,

THROUGH 2014 ($ BILLIONS) ..................................................................................................... 3

FIGURE 1 VALUE OF NANOFABRICATION EQUIPMENT COMPONENTS USED IN

SEMICONDUCTORS AND ELECTRONICS, 2009-2014 ............................................................ 4

FIGURE 2 MARKET SHARES OF NANOFABRICATION TECHNIQUES, 2008 ($

BILLIONS) ...................................................................................................................................... 5

TABLE 2 VALUE OF NANOFABRICATION INDUSTRY, 2008 AND 2007................................... 6

FIGURE 3 NANOFABRICATION MARKET TIERS AND INDUSTRY SHARES, 2008................ 7

VALUE OF THE NANOFABRICATION INDUSTRY................................................................. 8

TABLE 3 VALUE OF SEMICONDUCTOR EQUIPMENT AND MATERIALS,

THROUGH 2014 ($ BILLIONS).................................................................................................... 9

FIGURE 4 MARKET SHARES OF TOP TWENTY NANOFABRICATION EQUIPMENT

COMPANIES, 2008 ....................................................................................................................... 10

TABLE 4 VALUE OF THE NANOFABRICATION INDUSTRY’S TOP 20 COMPANIES........... 11

TABLE 5 VALUE OF NANOFABRICATION INDUSTRY COMPANIES RANKED 21-40 ......... 12

TABLE 6 VALUE OF NANOFABRICATION INDUSTRY COMPANIES, RANKED 41-68 ........ 13

TABLE 7 VALUE NANOFABRICATION INDUSTRY COMPANIES............................................ 14

TABLE 8 MAJOR PUBLIC SEMICONDUCTOR EQUIPMENT COMPANIES, 2009 ................ 15

MARKETS BY REGION.............................................................................................................. 16

TABLE 9 VALUE OF SEMICONDUCTOR EQUIPMENT BY REGION, THROUGH 2014

($ BILLIONS)................................................................................................................................ 17

FIGURE 5 2009 SEMICONDUCTOR EQUIPMENT MARKET BY REGION............................... 17

TABLE 10 SEMICONDUCTOR MATERIALS MARKET BY REGION, THROUGH 2014

($ BILLIONS)................................................................................................................................ 18

VALUE OF SILICON MATERIALS FOR THE SEMICONDUCTOR INDUSTRY................. 21

TABLE 11 VALUE OF SEMICONDUCTOR INDUSTRY SILICON WAFERS,

THROUGH 2014........................................................................................................................... 22

TABLE 12 MAJOR POLYSILICON PRODUCERS FOR THE SEMICONDUCTOR

INDUSTRY ................................................................................................................................... 23

FIGURE 6 SEMICONDUCTOR MANUFACTURING FLOW CHART .......................................... 25

 Add 
4. NANO SEMICONDUCTOR MANUFACTURING METHODS26-91
$2,310.00
$1,617.00

NANO SEMICONDUCTOR MANUFACTURING METHODS ............................................................. 26

TABLE 13 GROWTH IN NANOFABRICATION METHODS, THROUGH 2014 ($

BILLIONS) .................................................................................................................................... 26

FIGURE 7 GROWTH IN NANOFABRICATION METHODS, 2009-2014 ($ BILLIONS)............. 27

TABLE 14 FOUNDRY COSTS FOR NANOFABRICATION OF 90-65NM, 45-32NM AND

22-12NM NODES .......................................................................................................................... 28

LITHOGRAPHY TECHNIQUES ................................................................................................ 28

TABLE 15 VALUE OF NANOLITHOGRAPHY PRODUCTS & METHODS, 2009-2014 ............. 29

TABLE 16 NANOLITHOGRAPHY APPLICATIONS ...................................................................... 30

TABLE 17 LITHOGRAPHIC PROCESS STEPS ............................................................................. 31

TABLE 18 LITHOGRAPHY TECHNOLOGY REQUIREMENTS – NEAR-TERM ....................... 32

NANOLITHOGRAPHY................................................................................................................ 36

TABLE 19 LITHOGRAPHY METHODS AND APPLICABLE NANOMETER NODES................ 36

PHOTOLITHOGRAPHY.............................................................................................................. 37

TABLE 20 BASIC PHOTOLITHOGRAPHY PROCESS STEPS..................................................... 38

STEPPER INDUSTRY STRUCTURE AND MARKET OUTLOOK ......................................... 39

TABLE 21 STEPPER MANUFACTURERS..................................................................................... 40

TABLE 21 STEPPER MANUFACTURERS (CONTINUED) ......................................................... 41

TABLE 22 STEPS FOR SINGLE METAL VERSION OF 35NM BASELINE RUN...................... 43

TABLE 23 LITHOGRAPHY STEPS AND RELATED INFORMATION ........................................ 44

TABLE 24 DOUBLE PATTERNING TECHNIQUES...................................................................... 50

EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL) ............................................................. 52

FIGURE 8 EVALUATION OF A LIGHT SOURCE AT PHILIPS EXTREME UV ........................ 53

TABLE 25 SELECTED EUVL INNOVATIONS BY COMPANY.................................................... 58

TABLE 25 SELECTED EUVL INNOVATIONS BY COMPANY (CONTINUED) ........................ 59

MASKLESS LITHOGRAPHY ..................................................................................................... 61

FIGURE 9 ZONE-PLATE-ARRAY LITHOGRAPHY (ZPAL) .......................................................... 65

TABLE 26 MASKLESS LITHOGRAPHY MANUFACTURERS..................................................... 66

TABLE 26 MASKLESS LITHOGRAPHY MANUFACTURERS (CONTINUED) .......................... 67

TABLE 26 MASKLESS LITHOGRAPHY MANUFACTURERS (CONTINUED) .......................... 68

IMPRINT LITHOGRAPHY ......................................................................................................... 68

FIGURE 10 NANOINK’S NLP 2000 NANO LITHOGRAPHY PLATFORM.................................. 70

FIGURE 11 SEQUENCE FOR CREATING A RESIST MASK BY STEP-AND-STAMP

NIL. ................................................................................................................................................ 81

STRUCTURE OF THE IMPRINT INDUSTRY.......................................................................... 83

TABLE 27 NANO-IMPRINT LITHOGRAPHY COMPANIES......................................................... 83

TABLE 27 NANO-IMPRINT LITHOGRAPHY COMPANIES (CONTINUED).............................. 84

TABLE 27 NANO-IMPRINT LITHOGRAPHY COMPANIES (CONTINUED).............................. 85

APPLICATIONS: NANO-IMPRINT............................................................................................ 85

TABLE 28 NANO-IMPRINT APPLICATIONS ................................................................................ 86

FIGURE 12 NIL TECHNOLOGY QUARTZ AND SILICON STANDARD STAMPS

WITH LINEWIDTHS DOWN TO 50NM...................................................................................... 87

 Add 
5. MASK MAKING92-135
$1,540.00
$1,078.00

 MASK MAKING ............................................................................................................................ 92

TABLE 29 COMMON MASK TYPES................................................................................................ 93

TABLE 30 LIST OF THE LITHOGRAPHY STEPS AND THE ASSIGNED MASKS UP

TO THE FIRST METAL LAYER.................................................................................................. 94

MASK INDUSTRY STRUCTURE............................................................................................... 95

TABLE 31 LITHOGRAPHY MASK INDUSTRY ORGANIZATIONS .......................................... 96

TABLE 31 LITHOGRAPHY MASK INDUSTRY ORGANIZATIONS (CONTINUED) ............... 97

TABLE 31 LITHOGRAPHY MASK INDUSTRY ORGANIZATIONS (CONTINUED) ............... 98

TABLE 31 LITHOGRAPHY MASK INDUSTRY ORGANIZATIONS (CONTINUED) ............... 99

TABLE 31 LITHOGRAPHY MASK INDUSTRY ORGANIZATIONS (CONTINUED) ............. 100

FIGURE 13 MAKING A MASK FOR NANOLITHOGRAPHY STEPS 1-6.................................. 102

DOUBLE PATTERNING........................................................................................................... 104

COST OF LITHOGRAPHY........................................................................................................ 106

LITHOGRAPHY TECHNOLOGY CHALLENGES.................................................................. 108

TABLE 32 LITHOGRAPHY CHALLENGES.................................................................................. 109

TABLE 32 LITHOGRAPHY CHALLENGES (CONTINUED)....................................................... 110

BEAM METHODS/LIGHT SOURCES ..................................................................................... 111

TABLE 33 VALUE BEAM PRODUCTS & METHODS, THROUGH 2014 ($ MILLIONS)......... 112

TABLE 34 LIGHT SOURCE MARKET SHARES, 2009 COMPARED TO 2014.......................... 113

FIGURE 14 LIGHT SOURCE MARKET SHARES, 2009 COMPARED TO 2014 ....................... 113

TABLE 35 WAVELENGTHS OF EXCIMER LASERS .................................................................. 116

TABLE 36 UV AND EUV BEAM MANUFACTURERS AND SALES VALUE, 2008 ($

BILLIONS) .................................................................................................................................. 121

TABLE 36 UV AND EUV BEAM MANUFACTURERS AND SALES VALUE, 2008 ($

BILLIONS) CONTINUED .......................................................................................................... 122

TABLE 36 UV AND EUV BEAM MANUFACTURERS AND SALES VALUE, 2008 ($

BILLIONS) CONTINUED .......................................................................................................... 123

TABLE 36 UV AND EUV BEAM MANUFACTURERS AND SALES VALUE, 2008 ($

BILLIONS) CONTINUED .......................................................................................................... 124

TABLE 36 UV AND EUV BEAM MANUFACTURERS AND SALES VALUE, 2008 ($

BILLIONS) CONTINUED .......................................................................................................... 125

RECENT DEVELOPMENTS..................................................................................................... 127

 Add 
6. NANOLITHOGRAPHY SEMICONDUCTOR AND ELECTRONICS MARKET APPLICATIONS136-182
$1,645.00
$1,151.50

NANOLITHOGRAPHY SEMICONDUCTOR AND ELECTRONICS MARKET

APPLICATIONS ............................................................................................................................... 136

TABLE 37 REVENUE FOR PRODUCTS MANUFACTURED BY LITHOGRAPHIC

PROCESSES, THROUGH 2014 ($ BILLIONS)........................................................................ 136

FIGURE 15 MARKET APPLICATIONS FOR NANOLITHOGRAPHY, 2008.............................. 137

TABLE 38 TOP 10 MARKET APPLICATIONS FOR LITHOGRAPHIC TECHNIQUES,

2008.............................................................................................................................................. 138

FIGURE 16 VALUE OF PRODUCTS MANUFACTURED BY LITHOGRAPHIC

TECHNIQUES, 2008................................................................................................................... 139

SEMICONDUCTORS................................................................................................................. 141

TABLE 39 SEMICONDUCTOR MARKET VALUE 2008 .............................................................. 141

FIGURE 17 2008 REVENUE FOR SEMICONDUCTORS CREATED BY

LITHOGRAPHIC TECHNIQUES.............................................................................................. 142

FIGURE 18 LITHOGRAPHIC SEMICONDUCTOR MARKET APPLICATIONS 2009.............. 143

TABLE 40 MAJOR APPLICATIONS OF SEMICONDUCTORS.................................................. 144

TABLE 40 MAJOR APPLICATIONS OF SEMICONDUCTORS (CONTINUED)....................... 145

SEMICONDUCTOR SALES BY REGION ............................................................................... 146

FIGURE 19 SEMICONDUCTOR SALES BY REGION, JANUARY 2009 ................................... 146

TABLE 41 THREE-MONTH AVERAGE SEMICONDUCTOR SALES FOR JANUARY

BY YEAR ($) ................................................................................................................................ 147

MEMORY................................................................................................................................... 147

TABLE 42 DRAM MANUFACTURER MARKET SHARES, 2008................................................ 149

TABLE 43 MAJOR FLASH MEMORY MANUFACTURERS ...................................................... 151

ASICS ......................................................................................................................................... 152

TABLE 44 MAJOR ASIC SUPPLIERS........................................................................................... 153

MICROPROCESSORS AND CENTRAL PROCESSING UNITS ........................................... 153

TABLE 45 MICROPROCESSOR CONTROLLER COMPANIES ................................................ 153

TABLE 45 MICROPROCESSOR CONTROLLER COMPANIES (CONTINUED) ...................... 154

TABLE 46 MAJOR CENTRAL PROCESSING UNIT (CPU) MANUFACTURERS, 2009.......... 155

HARD DISK DRIVES ................................................................................................................ 155

TABLE 47 VALUE OF THE HARD DISK MARKET, 2009-2014 ($ BILLIONS)......................... 156

TABLE 48 LEADING HARD DRIVE MANUFACTURERS .......................................................... 159

SOLID STATE DRIVES............................................................................................................. 160

TABLE 49 SOLID STATE STORAGE COMPANIES .................................................................... 161

TABLE 50 LEADING SSD COMPANIES 2009.............................................................................. 163

TABLE 50 LEADING SSD COMPANIES 2009 (CONTINUED)................................................... 164

TABLE 51 RADIO FREQUENCY APPLICATIONS AND LITHOGRAPHIC

MANUFACTURING TECHNIQUES......................................................................................... 167

TABLE 52 VALUE OF RADIO FREQUENCY SEMICONDUCTORS, THROUGH 2014 ($

BILLIONS) .................................................................................................................................. 168

TABLE 53 RADIO FREQUENCY (WIRELESS) APPLICATIONS AND LITHOGRAPHY ........ 169

TABLE 54 LEADING WIRELESS TECHNOLOGY COMPANIES AND ..................................... 171

LITHOGRAPHY TECHNIQUES...................................................................................................... 171

TABLE 55 PRINTED CIRUCIT BOARD MARKET VALUE, THROUGH 2014 ($

BILLIONS) .................................................................................................................................. 172

TABLE 56 PRINTED CIRCUIT BOARD MANUFACTURERS.................................................... 173

TABLE 57 2009 CAPITAL EXPENDITURES BY MAJOR SEMICONDUCTOR

MANUFACTURER..................................................................................................................... 174

TABLE 57 2009 CAPITAL EXPENDITURES BY MAJOR SEMICONDUCTOR

MANUFACTURER (CONTINUED)........................................................................................... 175

TABLE 57 2009 CAPITAL EXPENDITURES BY MAJOR SEMICONDUCTOR

MANUFACTURER (CONTINUED)........................................................................................... 176

TABLE 57 2009 CAPITAL EXPENDITURES BY MAJOR SEMICONDUCTOR

MANUFACTURER (CONTINUED)........................................................................................... 177

TABLE 58 OTHER SEMICONDUCTOR MANUFACTURERS EMPLOYING

LITHOGRAPHIC TECHNOLOGY............................................................................................. 178

TABLE 58 OTHER SEMICONDUCTOR MANUFACTURERS EMPLOYING

LITHOGRAPHIC TECHNOLOGY (CONTINUED).................................................................. 179

TABLE 59 RECENT START-UP COMPANIES............................................................................. 180

TABLE 60 NANOTECHNOLOGY ENABLED COMMON IT CONSUMER PRODUCTS.......... 181

 Add 
7. PHOTONICS, OPTO-ELECTRONICS, OPTICS AND LITHOGRAPHY183-255
$2,555.00
$1,788.50

PHOTONICS, OPTO-ELECTRONICS, OPTICS AND LITHOGRAPHY............................................ 183

TABLE 61 VALUE OF PHOTONICS, PHOTONIC MANUFACTURING EQUIPMENT

AND PHOTONIC MATERIALS, 2009-1014.............................................................................. 183

FIGURE 20 APPLICATIONS FOR LITHOGRAPHIC MANUFACTURING METHODS

IN THE PHOTONICS INDUSTRY............................................................................................ 184

TABLE 62 VALUE OF LITHOGRAPHICALLY PRODUCED PHONTONIC AND MEMS

PRODUCTS AND COMPONENTS, THROUGH 2014 ($ BILLIONS).................................... 185

FIGURE 21 PHOTONIC COMPONENTS VALUES, 2009-2014 CAGR....................................... 186

TABLE 63 2009 VALUE OF PHOTONIC AND OPTOELECTRONIC APPLICATIONS........... 188

PHOTONIC AND OPTO-ELECTRONIC COMPONENTS ..................................................... 189

TABLE 64 VALUE OF OPTO-ELECTRONIC AND PHOTONIC COMPONENTS,

THROUGH 2014 ($ BILLIONS) ................................................................................................. 189

TABLE 65 OPTO-ELECTRONIC COMPONENTS MANUFACTURED...................................... 191

BY LITHOGRAPHIC METHODS..................................................................................................... 191

TABLE 66 COMPANIES, PHOTONIC DEVICES AND LITHOGRAPHIC METHODS............. 194

TABLE 66 COMPANIES, PHOTONIC DEVICES AND LITHOGRAPHIC METHODS

(CONTINUED)............................................................................................................................ 195

TABLE 67 COMPANIES AND ORGANIZATIONS INVOLVED IN DEVELOPING

PHOTONICS............................................................................................................................... 196

TABLE 67 COMPANIES AND ORGANIZATIONS INVOLVED IN DEVELOPING

PHOTONICS (CONTINUED)..................................................................................................... 197

TABLE 67 COMPANIES AND ORGANIZATIONS INVOLVED IN DEVELOPING

PHOTONICS (CONTINUED)..................................................................................................... 198

TABLE 67 COMPANIES AND ORGANIZATIONS INVOLVED IN DEVELOPING

PHOTONICS (CONTINUED)..................................................................................................... 199

FIGURE 22 INTEL HYBRID SILICON LASER ............................................................................ 203

TABLE 68 PHOTONIC MATERIALS AND LITHOGRAPHIC METHODS................................. 206

TELECOM MARKET................................................................................................................. 206

FIGURE 23 OPTICAL EQUIPMENT FOR THE TELECOM MARKET, 2009-2014................... 207

TABLE 69 VALUE OF OPTO-ELECTRONIC AND PHOTONIC COMPONENTS FOR

THE TELECOM MARKET 2009-2014 CAGR% ($ BILLIONS) ............................................... 208

TABLE 70 TELECOM NETWORK AND COMPONENT MANUFACTURERS .......................... 208

TABLE 70 TELECOM NETWORK AND COMPONENT MANUFACTURERS

(CONTINUED)............................................................................................................................ 209

DISPLAY MARKET ................................................................................................................... 209

TABLE 71 VALUE OF DISPLAY TECHNOLOGIES MANUFACTURED BY

LITHOGRAPHIC METHODS, THROUGH 2014 ($ BILLIONS) ............................................ 210

FIGURE 24 VALUE OF DISPLAY TECHNOLOGY, 2009-2014................................................... 211

TABLE 72 PLASMA PANEL COMPANY MARKET SHARE, 2008.............................................. 213

TABLE 73 PLASMA DISPLAY MANUFACTURERS AND LITHOGRAPHIC

TECHNIQUES............................................................................................................................ 214

TABLE 74 TOP LCD MANUFACTURERS, 2009........................................................................... 216

TABLE 75 LCD MANUFACTURERS AND LITHOGRAPHY....................................................... 217

TABLE 76 VALUE OF LED MARKET, THROUGH 2014 ($ BILLIONS) ................................... 219

TABLE 77 VALUE OF LED APPLICATIONS, THROUGH 2014 ($ MILLIONS) ....................... 220

TABLE 78 COMPANIES, LIGHT-EMITTING DEVICES AND LITHOGRAPHY ...................... 222

TABLE 78 COMPANIES, LIGHT-EMITTING DEVICES AND LITHOGRAPHY

(CONTINUED)............................................................................................................................ 223

TABLE 79 LED MANUFACTURERS ............................................................................................. 224

TABLE 79 LED MANUFACTURERS (CONTINUED) .................................................................. 225

TABLE 80 VALUE OF THE GLOBAL ILLUMINATION MARKET, 2009 .................................. 226

TABLE 81 REGIONAL MARKETS FOR ILLUMINATION, 2009................................................ 226

SOLAR POWER.......................................................................................................................... 227

TABLE 82 VALUE OF THE SOLAR POWER MARKET, 2009-2014 ........................................... 229

TABLE 83 TOP NATIONAL PV INSTALLATIONS BY MEGAWATT, 2008............................... 231

TABLE 84 LEADING SOLAR POWER PANEL MANUFACTURERS......................................... 233

TABLE 85 SOLAR POWER AND LITHOGRAPHY ....................................................................... 234

TABLE 85 SOLAR POWER AND LITHOGRAPHY (CONTINUED) ............................................ 235

SENSORS................................................................................................................................... 235

TABLE 86 SENSOR APPLICATION MARKETS 2009 ................................................................. 236

TABLE 87 SENSOR VALUE BY APPLICATION, THROUGH 2014 ($ BILLIONS) .................. 237

TABLE 88 COMPANIES, SENSOR PRODUCTS AND LITHOGRAPHY.................................... 238

MICRO ELECTROMECHANICAL SYSTEMS (MEMS) ......................................................... 239

TABLE 89 VALUE OF MEMS EQUIPMENT AND MATERIALS MARKET, THROUGH

2014 ($ MILLIONS) ..................................................................................................................... 240

TABLE 90 MEMS MANUFACTURING EQUIPMENT & MATERIALS, THROUGH

2014 ($ MILLIONS) ..................................................................................................................... 240

TABLE 91 MARKET SHARES OF EQUIPMENT FOR MEMS FABRICATION, 2009 ($

MILLIONS) ................................................................................................................................. 241

FIGURE 25 MARKET SHARES OF EQUIPMENT FOR MEMS FABRICATION...................... 242

TABLE 92 VALUE OF MEMS MATERIALS MARKET, THROUGH 2014 ($ MILLIONS) ....... 242

TABLE 93 VALUE OF MEMS MATERIALS MARKET, 2009 ...................................................... 243

FIGURE 26 MARKET SHARES OF MATERIALS FOR MEMS FABRICATION....................... 243

TABLE 94 MEMS APPLICATIONS AND MARKETS, 2009......................................................... 244

FIGURE 27 2009 MEMS APPLICATIONS..................................................................................... 245

TABLE 95 VALUE OF MEMS DEVICES AND MEMS-BASED SYSTEMS AND

PRODUCTS, THROUGH 2014 ($ BILLIONS).......................................................................... 246

TABLE 96 MEMS MANUFACTURING AND LITHOGRAPHY ................................................... 248

TABLE 96 MEMS MANUFACTURING AND LITHOGRAPHY (CONTINUED) ........................ 249

TABLE 97 MAJOR MEMS MANUFACTURERS, 2009................................................................. 250

OTHER PHOTONICS ................................................................................................................ 250

TABLE 98 OTHER PHOTONIC APPLICATIONS USING LITHOGRAPHIC

APPARATUS, THROUGH 2014 ($ BILLIONS)........................................................................ 250

TABLE 99 COMPANIES, MEDICAL PHOTONIC APPLICATIONS AND

LITHOGRAPHIC METHODS .................................................................................................... 252

TABLE 100 EXAMPLES OF OPTICAL PRODUCTS FOR SEMICONDUCTORS/LCD

LITHOGRAPHY EQUIPMENT.................................................................................................. 254

 Add 
8. PATENT ANALYSIS256-272
$595.00
$416.50

PATENT ANALYSIS...................................................................................................................... 256

TABLE 101 PATENT APPLICATIONS APRIL 19, 2001-FEBRUARY 5, 2009 ........................... 256

TABLE 102 U.S. PATENTS BY NATION....................................................................................... 257

TABLE 103 U.S. NANO PATENTS BY YEAR, 2000-2008 ............................................................ 258

FIGURE 28 U.S. NANO-PATENTS BY YEAR 2000-2008............................................................. 258

TABLE 104 U.S. NANO PATENTS BY YEAR, 1999 & PRIOR THROUGH 2008 ...................... 259

TABLE 105 U.S. NANO PATENTS BY INVENTORS AND THEIR STATES THROUGH

FEBRUARY 5, 2009..................................................................................................................... 260

TABLE 106 U.S. NANO PATENTS BY ASSIGNEES AND THEIR STATES THROUGH

FEBRUARY 5, 2009..................................................................................................................... 261

TABLE 107 LITHOGRAPHY PATENTS AND APPLICATIONS BY ORGANIZATION ............ 262

TABLE 108 50 RECENT LITHOGRAPHY PATENTS, FEB.24, 2009-NOV 11, 2008................. 263

TABLE 108 50 RECENT LITHOGRAPHY PATENTS, FEB.24, 2009-NOV 11, 2008

(CONTINUED)............................................................................................................................ 264

TABLE 108 50 RECENT LITHOGRAPHY PATENTS, FEB.24, 2009-NOV 11, 2008

(CONTINUED)............................................................................................................................ 265

TABLE 109 50 RECENT LITHOGRAPHIC PATENTS, FEB. 24, 2009 -DEC.9, 2008................ 265

TABLE 109 50 RECENT LITHOGRAPHIC PATENTS, FEB. 24, 2009 -DEC.9, 2008

(CONTINUED)............................................................................................................................ 266

TABLE 109 50 RECENT LITHOGRAPHIC PATENTS, FEB. 24, 2009 -DEC.9, 2008

(CONTINUED)............................................................................................................................ 267

TABLE 110 50 RECENT LITHOGRAPHY PATENT APPLICATIONS, FEB. 19, 2009-

DEC. 18, 2008.............................................................................................................................. 268

TABLE 110 50 RECENT LITHOGRAPHY PATENT APPLICATIONS, FEB. 19, 2009-

DEC. 18, 2008 (CONTINUED) ................................................................................................... 269

TABLE 110 50 RECENT LITHOGRAPHY PATENT APPLICATIONS, FEB. 19, 2009-

DEC. 18, 2008 (CONTINUED) ................................................................................................... 270

TABLE 111 LITHOGRAPHIC PATENT APPLICATIONS, FEB. 19, 2009-DEC. 18, 2008 ........ 271

TABLE 111 LITHOGRAPHIC PATENT APPLICATIONS, FEB. 19, 2009-DEC. 18, 2008

(CONTINUED)............................................................................................................................ 272

 Add 
9. NANOLITHOGRAPHY PROFILES273-408
$2,040.00
$1,428.00

NANOLITHOGRAPHY PROFILES....................................................................................................... 273

4D TECHNOLOGY CORPORATION ....................................................................................... 273

ABEAM TECHNOLOGIES, INC............................................................................................... 273

ADVANCED SEMICONDUCTOR ENGINEERING (ASE) GROUP...................................... 274

ADVANCE NANOTECH, INC .................................................................................................. 275

ADVANTEST CORPORATION................................................................................................. 276

AGILENT TECHNOLOGIES .................................................................................................... 276

AIXTRON AG............................................................................................................................. 277

AMTECH SYSTEMS, INC......................................................................................................... 278

AMETEK.................................................................................................................................... 278

AMETEK-ATOMIKA/ CAMECA, .............................................................................................. 279

ANCHOR SEMICONDUCTOR INC. ........................................................................................ 280

ANTARIA LIMITED/ADVANCED NANOTECHOLOGY LIMITED...................................... 280

API NANOTRONICS ................................................................................................................. 281

APPLIED MATERIALS, INC. ................................................................................................... 282

ARRADIANCE INC.................................................................................................................... 284

ARROWHEAD RESEARCH CORP./UNIDYM ........................................................................ 284

ASAHI GLASS CO...................................................................................................................... 286

ASML.......................................................................................................................................... 287

TABLE 112 CURRENT ASML LITHOGRAPHY PRODUCT PORTFOLIO OF

STEPPERS AND STEP & SCAN SYSTEMS ........................................................................... 288

ASYST TECHNOLOGIES, INC. ............................................................................................... 289

ATMI, INC ................................................................................................................................. 290

AVIZA TECHNOLOGY, INC..................................................................................................... 290

AXCELIS TECHNOLOGIES, INC. ........................................................................................... 290

BIOSENSIA ............................................................................................................................... 291

BREWER SCIENCE INC........................................................................................................... 291

BRION TECHNOLOGIES......................................................................................................... 292

BROOKS AUTOMATION, INC................................................................................................. 293

CANON ANELVA CORPORATION ......................................................................................... 293

CEA-LETI .................................................................................................................................. 294

CHA INDUSTRIES .................................................................................................................... 295

COGNEX CORPORATION........................................................................................................ 296

COHU......................................................................................................................................... 296

COORSTEK JAPAN................................................................................................................... 297

CRESTEC CORPORATION ...................................................................................................... 297

CUBIC WAFER, INC. ................................................................................................................ 297

CVD EQUIPMENT CORPORATION ....................................................................................... 298

CVI MELLES GRIOT................................................................................................................. 299

CYANTEK CORP. ...................................................................................................................... 300

CYMER, INC.............................................................................................................................. 300

DEEP PHOTONICS CORP........................................................................................................ 301

DIRECT2SILICON (D2S) .......................................................................................................... 302

DOW CORNING CORP. ............................................................................................................ 302

ELIONIX, INC. ........................................................................................................................... 303

ELECTROGLAS, INC. ............................................................................................................... 303

ENERGETIQ TECHNOLOGY, INC. ........................................................................................ 304

FIGURE 29 ENERGETIQ EQ-10HR............................................................................................... 304

ENTHONE GMBH..................................................................................................................... 304

EUV LITHO INC........................................................................................................................ 305

EV GROUP (EVG) ...................................................................................................................... 305

EXFO ELECTRO-OPTICAL ENGINEERING, INC. (EXFO) ................................................. 306

FEI COMPANY .......................................................................................................................... 307

FIBICS INCORPORATED......................................................................................................... 308

FREESCALE SEMICONDUCTOR, INC. ................................................................................. 308

FUJITSU LIMITED ................................................................................................................... 310

FIGURE 30 FUJITSU 2008 REVENUES BY SEGMENT ............................................................ 310

GESTION UNIVALOR, L.P....................................................................................................... 311

GIGAPHOTON, INC. ................................................................................................................. 311

FIGURE 31 GIGAPHOTON MARKET SALES .............................................................................. 312

HAKUTO CO., LTD.................................................................................................................... 313

HAMATECH APE (SINGULUS GROUP) ................................................................................ 313

HEADWATERS NANOKINETIX, INC. ................................................................................... 314

HEIDELBERG INSTRUMENTS MIKROTECHNIK GMBH ................................................. 314

HEMLOCK SEMICONDUCTOR CORPORATION................................................................. 315

HITACHI KOKUSAI ELECTRIC, INC. ................................................................................... 316

HITACHI HIGH TECHNOLOGIES AMERICA....................................................................... 316

HOLON CO., LTD. ..................................................................................................................... 317

HORIBA, LTD............................................................................................................................ 317

HONEYWELL ELECTRONIC MATERIALS........................................................................... 318

IBM............................................................................................................................................. 318

IBM ALLIANCE ......................................................................................................................... 319

IMEC .......................................................................................................................................... 320

IMPATTERN SOLUTIONS....................................................................................................... 323

IMS NANOFABRICATION....................................................................................................... 323

INTEGRAN TECHNOLOGIES................................................................................................. 324

INTEL CORPORATION (INTEL) ............................................................................................. 325

INTEVAC................................................................................................................................... 326

ION BEAM SERVICES.............................................................................................................. 326

ISHII TOOL & ENGINEERING CORPORATION.................................................................. 327

JAPAN LASER CORPORATION.............................................................................................. 327

JAPAN ELECTRONIC MATERIAL CORPORATION............................................................ 328

KANEMATSU CORPORATION................................................................................................ 328

KLA-TENCOR CORPORATION............................................................................................... 329

KOTURA, INC. ........................................................................................................................... 330

KULICKE AND SOFFA INDUSTRIES, INC........................................................................... 331

KURT J. LESKER COMPANY.................................................................................................. 331

LAM RESEARCH CORPORATION.......................................................................................... 332

LITHO TECH JAPAN CORPORATION................................................................................... 333

LOT-ORIEL GROUP.................................................................................................................. 333

LTX-CREDENCE CORPORATION.......................................................................................... 334

LUMARRAY............................................................................................................................... 334

LUMINESCENT TECHNOLOGIES, INC................................................................................ 335

MATTSON TECHNOLOGY, INC. ............................................................................................ 336

MEDIA LARIO TECHNOLOGIES S.R.L. ................................................................................ 337

MENTOR GRAPHICS, INC....................................................................................................... 337

MICRONIC LASER SYSTEMS AB........................................................................................... 338

MICRO LITHOGRAPHY INC. (MLI) ....................................................................................... 339

MICRO RESIST TECHNOLOGY GMBH................................................................................. 339

MKS INSTRUMENTS, INC. ..................................................................................................... 339

MOLECULAR MANUFACTURING ENTERPRISES, INC. ................................................... 340

MOLECULAR IMPRINTS, INC................................................................................................ 340

FIGURE 32 MOLECULAR IMPRINTS NIL APPARATUS........................................................... 342

MONODRIVE, INC. ................................................................................................................... 343

N&K TECHNOLOGY, INC........................................................................................................ 344

NANOCHIP................................................................................................................................ 344

NANO CLUSTER DEVICES LIMITED ................................................................................... 345

NANOGATE AG......................................................................................................................... 345

NANOIDENT AG ....................................................................................................................... 346

FIGURE 33 WORLD’S FIRST PRINTED LAB-ON-A-CHIP SENSOR BY NANOIDENT ......... 347

NANOINK, INC.......................................................................................................................... 348

NANOLAB ................................................................................................................................. 348

NANOLANE ............................................................................................................................... 349

NANO-MASTER, INC................................................................................................................ 349

NANOMATERIALS DISCOVERY CORPORATON (NCD)..................................................... 350

NANOMETER STORAGE CORPORATION............................................................................ 350

NANOMETRICS INC................................................................................................................. 351

NANOMIX, INC.......................................................................................................................... 351

NANONEX CORPORATION..................................................................................................... 352

NANONICS IMAGING LTD. .................................................................................................... 353

FIGURE 34 BSA PROTEIN NANOPRINTING............................................................................. 354

NANO SYSTEM SOLUTIONS, INC. ........................................................................................ 354

NANOPLUS GMBH................................................................................................................... 355

NANO-TERRA, INC. .................................................................................................................. 356

NANO-UV .................................................................................................................................. 357

NAPA (EMERGING NANOPATTERNING METHODS) CONSORTIUM............................. 357

TABLE 113 NAPA CONSORTIUM MEMBERS, 2009 .................................................................. 358

TABLE 113 NAPA CONSORTIUM MEMBERS, 2009 (CONTINUED) ...................................... 359

NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY....................................... 359

NEXX SYSTEMS........................................................................................................................ 360

NIKON CORPORATION........................................................................................................... 361

FIGURE 35 NIKON STEPPERS AND SCANNERS..................................................................... 363

NIL TECHNOLOGY APS .......................................................................................................... 364

NISSIN ELECTRIC CO., LTD. ................................................................................................. 364

NOVA MEASURING INSTRUMENTS LTD............................................................................ 365

NOVELLUS SYSTEMS, INC. ................................................................................................... 365

NUMERICAL TECHNOLOGIES.............................................................................................. 367

OBDUCAT.................................................................................................................................. 368

OERLIKON................................................................................................................................ 369

OPTNICS PRECISION (OPT) ................................................................................................... 369

ORBOTECH LTD. ...................................................................................................................... 370

ORSAY PHYSICS S.A. ............................................................................................................... 370

OXFORD INSTRUMENTS........................................................................................................ 370

PALL CORPORATION .............................................................................................................. 371

PARTICLE MEASURING SYSTEMS, INC.............................................................................. 372

PDF SOLUTIONS, INC. ............................................................................................................ 372

PHILIPS EXTREME UV ........................................................................................................... 373

PYXIS TECHNOLOGY.............................................................................................................. 373

QUNANO AB............................................................................................................................. 374

QUANTUM WAVE TECHNOLOGIES..................................................................................... 374

RAITH GMBH ............................................................................................................................ 375

RAVE LLC ................................................................................................................................. 376

RAYMOR INDUSTRIES INC.................................................................................................... 377

RAYTEX CORPORATION......................................................................................................... 377

REMARKABLE MASK TECHNOLOGY CO. LTD. ................................................................. 378

NO. 7 DAI SHUN STREET, TAI PO INDUSTRIAL ESTATE, TAI PO, NEW

TERRITORIES, HONG KONG........................................................................................... 378

REPLISAURUS TECHNOLOGIES .......................................................................................... 378

FIGURE 36 REPLISAURUS ELECTROCHEMICAL PATTERN REPLICATION..................... 379

RF NANO CORPORATION....................................................................................................... 379

ROHM AND HAAS ELECTRONIC MATERIALS................................................................... 380

RUDOLPH TECHNOLOGIES, INC. ........................................................................................ 380

SAMSUNG................................................................................................................................. 381

SAMSUNG ELECTRO-MECHANICS CO., LTD. .................................................................... 381

SCHOTT LITHOTEC, DIVISION OF SCHOTT AG................................................................ 382

SEKI TECHNOTRON CORPORATION................................................................................... 382

SEMATECH............................................................................................................................... 383

SEMITOOL, INC. ....................................................................................................................... 384

SEMPRIUS ................................................................................................................................ 384

S. E. S. CO., LTD. ....................................................................................................................... 385

S.E.T. (SMART EQUIPMENT TECHNOLOGY)...................................................................... 385

SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD. ........................................... 386

SILICON LIGHT MACHINES .................................................................................................. 386

SOKUDO CO., LTD.................................................................................................................... 387

SOLID STATE EQUIPMENT CORPORATION ...................................................................... 387

SONIX, INC ............................................................................................................................... 388

SUSS MICROTEC LITHOGRAPHY GMBH............................................................................ 388

SYNOPSYS, INC. ....................................................................................................................... 389

TAIWAN SEMICONDUCTOR MFG. CO. LTD. (TSMC) ........................................................ 390

TABLE 114 MAJOR INDEPENDENT FOUNDRIES/LITHOGRAPHY CUSTOMERS............ 391

TAKUMI TECHNOLOGY CORPORATION ............................................................................ 391

TELA INNOVATIONS............................................................................................................... 392

TECHNO ALPHA CO., LTD...................................................................................................... 393

TEGAL CORPORATION ........................................................................................................... 393

TESSERA................................................................................................................................... 395

TOUMAZ TECHNOLOGY LIMITED/NANOSCIENCE TECHNOLOGIES, INC................. 395

TOKYO ELECTRON LIMITED ................................................................................................ 396

TABLE 115 JAPANESE NANOFABRICATION COMPANIES FOR THE

SEMICONDUCTOR INDUSTRY............................................................................................... 397

TRANSFER DEVICES, INC...................................................................................................... 397

TOPPAN PHOTOMASKS, INC. (TOPPAN PRINTING)........................................................ 398

TOWA CORPORATION............................................................................................................. 400

ULTRATECH, INC..................................................................................................................... 400

VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. ....................................... 401

VERIGY LTD. ............................................................................................................................. 401

VISTEC SEMICONDUCTOR SYSTEMS, INC. ....................................................................... 402

VTT MICROELECTRONIC CENTER...................................................................................... 403

WACOM QUARTZ CORPORATION......................................................................................... 404

XEI SCIENTIFIC, INC. ............................................................................................................. 404

XLITH......................................................................................................................................... 405

XRADIA INC.............................................................................................................................. 405

XYALIS ...................................................................................................................................... 406

ZETTACORE, INC. .................................................................................................................... 406

ZYGO CORPORATION.............................................................................................................. 407

ZYVEX TECHNOLOGIES......................................................................................................... 407

 Add 
10. COMPANIES AND INSTITUTIONS WITH NANOLITHOGRAPHY RESEARCH PROJECTS409-444
$740.00
$518.00

COMPANIES AND INSTITUTIONS WITH NANOLITHOGRAPHY RESEARCH PROJECTS ...... 409

ALCES TECHNOLOGY, INC.................................................................................................... 409

ARIZONA STATE UNIVERSITY.............................................................................................. 410

BOSTON COLLEGE .................................................................................................................. 411

CORNELL UNIVERSITY.......................................................................................................... 412

EM PHOTONICS, INC. ............................................................................................................. 413

FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS ...................................... 413

HARVARD UNIVERSITY.......................................................................................................... 415

INPHASE TECHNOLOGIES .................................................................................................... 416

KAPTEYN-MURNANE LABS INC........................................................................................... 417

LAWRENCE BERKELEY NATIONAL LABORATORY ......................................................... 417

LUCENT TECHNOLOGIES...................................................................................................... 418

MASSACHUSETTS INSTITUTE OF TECHNOLOGY ........................................................... 419

NORTH CAROLINA AGRICULTURAL & TECHNICAL STATE UNIVERSITY................. 420

NORTHWESTERN UNIVERSITY............................................................................................ 421

OPTICAL RESEARCH ASSOCIATES...................................................................................... 422

OREGON STATE UNIVERSITY .............................................................................................. 423

PHOTONTECH, LLC................................................................................................................. 424

SCIENCE RESEARCH LABORATORY, INC. ......................................................................... 424

SEMICONDUCTOR LEADING EDGE TECHNOLOGIES, INC. (SELETE) ........................ 425

SMALL BUSINESS INNOVATION RESEARCH, NSF.......................................................... 426

SOUTHERN ILLINOIS UNIVERSITY AT CARBONDALE................................................... 426

STANFORD UNIVERSITY ....................................................................................................... 427

STATE UNIVERSITY OF NEW YORK (SUNY) AT BUFFALO ............................................ 428

UNITED STATES NAVAL ACADEMY.................................................................................... 428

UNIVERSITAT AUTÒNOMA DE BARCELONA (UAB) ........................................................ 429

UNIVERSITY OF CALIFORNIA-DAVIS ................................................................................. 430

UNIVERSITY OF CALIFORNIA-BERKELEY........................................................................ 431

UNIVERSITY OF CALIFORNIA-RIVERSIDE OFFICE OF RESEARCH............................ 433

UNIVERSITY OF CENTRAL FLORIDA ................................................................................. 434

UNIVERSITY OF COLORADO AT BOULDER....................................................................... 435

UNIVERSITY OF FLORIDA..................................................................................................... 436

UNIVERSITY OF KANSAS CENTER FOR RESEARCH, INC. ............................................. 438

UNIVERSITY OF MASSACHUSETTS, LOWELL.................................................................. 438

UNIVERSITY OF MICHIGAN, ANN ARBOR......................................................................... 439

UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE..................................................... 440

UNIVERSITY OF PENNSYLVANIA RESEARCH SERVICES.............................................. 441

UNIVERSITY OF VERMONT................................................................................................... 442

UNIVERSITY OF WISCONSIN-MADISON............................................................................ 442

ZENWA INC ............................................................................................................................... 443

OTHER NANOLITHOGRAPHY RSEARCH PROJECTS ....................................................... 444

TABLE 116 OTHER NANOLITHOGRAPHY RESEARCH PROJECTS...................................... 444

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